# Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

**Published:** September 14, 2026
**Author:** Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, S\"oren Auer, Jennifer D'Souza
**Source:** arXiv — cs.AI
**Language:** en-US
**HTML:** https://aiqazaqstan.com/en/articles/mined-from-scientific-literature-process-schemas-for-atomic-layer-deposi

arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four…

> From the original source: **arXiv — cs.AI**
> [Read full article at arXiv — cs.AI](https://arxiv.org/abs/2609.12139)

**Tags:** #arXiv

---

*AI Qazaqstan — non-commercial informational portal about AI in Kazakhstan. Machine translations and summaries are AI-generated.*