# Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

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**Published:** 2026 ж. 14 қыркүйек
**Author:** Sameer Sadruddin, Eleni Poupaki, Alex Watkins, Bora Karasulu, Adriaan J. M. Mackus, Erwin Kessels, S\"oren Auer, Jennifer D'Souza
**Source:** arXiv — cs.AI
**Language:** en-US
**HTML:** https://aiqazaqstan.com/kk/articles/mined-from-scientific-literature-process-schemas-for-atomic-layer-deposi

arXiv:2609.12139v1 Announce Type: new Abstract: Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four…

> Материал бастапқы дереккөзден алынған: **arXiv — cs.AI**
> [Толық мәтінді arXiv — cs.AI сайтында оқу](https://arxiv.org/abs/2609.12139)

**Тегтер:** #arXiv

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